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SF6,SF6,Sulfur hexafluoride,etching gas,
2011-09-23 09:332750询价
| 价格 |
面议 |
| 发货 |
AsiaChina |
| 品牌 |
Zhongli Fluoridation |
| 规格 |
Industrial & microelectronic grade |
|
该产品库存不足 |
产品详情
| Quality specification for SF6 |
| Item |
Unit |
IEC-376 |
ASTMD2472 |
Zhongli Standard |
| SF6 Purity |
%(m/m) |
≥99.8 |
≥99.8 |
99.96 |
99.99 |
| O2+N2 |
%(m/m) |
≤0.05 |
≤0.05 |
0.02 |
0.006 |
| CF4 |
%(m/m) |
≤0.05 |
≤0.05 |
0.02 |
0.02 |
| Acidity(expressed HF) |
ug/g |
≤0.3 |
≤0.3 |
0.2 |
0.2 |
| Hydralysable Fluoride (expressed HF) |
ug/g |
≤1 |
≤1 |
0.5 |
0.5 |
| Moisture |
ug/g |
≤5 |
Dew p
oint ≤-50℃ |
2 |
2 |
| Oil Content |
ug/g |
≤10 |
≤5 |
3 |
2 |
| Toxicity |
/ |
pass |
pass |
pass |
pass |
| Total impurity |
|
|
|
0.04 |
0.01 |
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